423գ2021ČЇMEMS܂aI(y)l(f)չI(y)ՓڰӲ[@_ʡLtģԺʿdίӛSPIͼeϯίӛLN_Ļʽ
SʾԹһԴ^̎Їϱֽ羀ǻĻAİl(f)ЃɂŰl(f)zַйſ̮̖750@ֵԴ^ɂzַО̽ԴԹžDz֮أСǡuҲǰʡһOг1949˰ȫCϽͨм~ͬFм~в^(q)26ϹI(y)ȫаl(f)֮һȫʏʾ(chung) ^(q)ijУҲǰQʏƬ^(q)֮һ҂ʩI(y)к̈́(chung)ӑ(zhn)ԣӏǰ̽ǰ˲֣eǾooЇ214늿4041ɹ(chung)MEMSҵطϹ̌ҵһش(zhn)ƽ_γ܂ԭOӋyԇb͑õaI(y)ɞȫʡΨһм·MEMSaij
ǰSһ݆HͮaI(y)׃dMOEMSVڹI(y)WԄ{t(y)5GȱIl(f)չǰV韟oޣδԡоǡ(chung)δ}RˇҲίWgI(y)ҵă(yu)㌣ҺI܊۽܂·_չ߶ˌԒ̽ӑ҂Դ˴δC^MrץC_(chung)δȫӏaWкʩ256Ƅ(chung)wϵOȫ·ĮaI(y)ȺaI(y)B(ti)ӿЇHһ(chung)Їй
AWУLԺʿoҕlf·aI(y)֧҇l(f)չͱχҰȫ(zhn)AȌԮaI(y)l(f)չ?ji)?chung)Ҹ߶ҕ·aI(y)İl(f)չMEMSĵ܂gǬFƼǰҲһϢg֧֮һĿǰ҇MEMSaI(y)l(f)չ܇һ҄(chung)ҸɵļgҺ̈́(chung)¾ӢӿFһГI(y)҂ҲѵJRĿǰcl(f)_ҵIJ҇еͶ˂Ԅӻˮƽ^߶˂Ј߀هMȱ(chung)µĺļgcaƷPIOԭϿӆ}ȻSϢg˹Wb䡢5GͨӍIl(f)չҪ҂оδ_^ЇMEMSaI(y)һʢ\ʮ塱MEMSl(f)չһҪӑǹͬaI(y)l(f)չڅݡͬоaI(y)l(f)չC;һδ
ڰʡĸ߶ҕʹ֧214MEMSоIȡشɿѽɞMEMSҪI(y)δ@MEMS@һ}ҕͬM҇ϢaI(y)δl(f)չQנ˲ĺvʷrδ_hx
tıʾCϵy(tng)MEMSӼgAϰl(f)չĶWƽǰоIҲδl(f)չҪ^ʮİl(f)չѳɞ粚ĿشƼI֮һS5GWrMEMS܂ȡy(tng)aƷVڸܽK܇t(y)ȱdIһϢg˹bIĻA֧@ѽɞPҺĸͮaI(y)朰ȫҪIʡooץס·aI(y)l(f)չđ(zhn)ԙCԳЈcɫl(f)չccͻcMcB(yng)YϣѴǸI(y)аɫļ·aI(y)ȺOӋbyԇbȫaI(y)朼˳^300I(y)γһĮaI(y)l(f)չ(yu)ݣec@ʾӲܼ늡Դ܇ȮaI(y)ںϰl(f)չ_SđÈ͏V韵ЈgҪĹI(y)ʏ(chung)ԇ^(q)ĺijУȥ֫@ЇQ^(q)Ƭ^(q)õͶYh(hun)ͮaI(y)AҲȫ֮һȫʡΨһͬrм·MEMSMEMSеaI(y)@дI(y)˲ЙCһ܂I(y)Џ2017_ʼBm(x)ekЇMEMSl(f)չ҂һϢYԴ۵ƽ_MһMMEMS܂aI(y)ĸ|l(f)չ
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