ЈLj(bo)ؔ(ci)(jng)W(wng)(m.xomn.cn)аӍ( ӛ |)417磬Ї()MEMS܂a(chn)I(y)l(f)չ(hu)l(f)(hu)ڰʡe
ӛߏİl(f)(hu)˽M(jn)һƄ(dng)܂a(chn)I(y)l(f)չͰʡƌW(xu)g(sh)dЇI(y)F(tun)˾Ʒl(f)չ(jng)^f(xi)̣Q2023421-23ڰйӲ[@ekЇ()MEMS܂a(chn)I(y)l(f)չ(hu)
ЇMEMS܂a(chn)I(y)l(f)չ(hu)ИI(y)(ni)OӰI(lng)Įa(chn)I(y)ʢ(hu)2017ڰɹekČáô(hu)“о۽ Ǹ”}(ni)S1+4+1+1һ߷ՓĂ(g)a(chn)I(y)(chung)°l(f)չ}ՓһͶYǢՄ(hu)һa(chn)I(y)(xing)Ŀ·
߷ՓՈ?jin)ʿҡI(y)I(lng)܊˲Ň@}_չּvM(jn)܂a(chn)I(y)|(zh)l(f)չԫI(xin)Ă(g)a(chn)I(y)Փքe@ͬ}Ո^I(y)Լa(chn)I(y)c(din)I(y)ԺУcЈ頿a(chn)I(y)朸h(hun)(ji)ĜͨԒƽ_(ti)f(xi)ͬ(chung)°l(f)չĽ(jng)(yn)͌(sh)`a(chn)I(y)(xing)Ŀ·ݺͶYǢՄ(hu)c(din)@a(chn)I(y)(xing)ĿȫRۃ(yu)YԴeOC(j)Ƅ(dng)ָ֧(xing)Ŀ
˴δ(hu)ɰʡЇI(y)F(tun)ָ(do)λɰʡƼdЇI(y)F(tun)Ʒl(f)չkЕ(hu)hMҎ(gu)a(chn)I(y)R،(sh)ЧИI(y)ٰl(f)չc(din)(hu)l(f)Ї()йȑ(zhn)Ҏ(gu)܂a(chn)I(y)ȫչʾ܂a(chn)I(y)I(lng)ȼg(sh)߶ˮa(chn)ƷM(jn)һ(qing)Ї()йȫаl(f)֮һ֪Ⱥ(hu)ͨ^M߷Փ(chung)a(chn)I(y)(chung)(lin)˵Ȼ(dng)R۸羫Ӣƽ_(ti)eOՈ“Ժ”Ժʿ֪I(y)҇@(chung)(q)(dng)a(chn)I(y)ɹD(zhun)}\܂a(chn)I(y)Ҏ(gu)ɫ߶˻l(f)չ(dng)ǰՈ6λԺʿ20҇(ni)P(gun)֪УͿԺČҌW(xu)ߡ300܂a(chn)I(y)I(y)20ͶYC(j)(gu)(hu)hӕ(hu)hA(y)Ӌ(j)δ(hu)ˆTs600(chung)v¸ߡ
и߶ҕ܂a(chn)I(y)l(f)չӿM(jn)Ƽ(chung)¹(jin)wϵO(sh)ȫ(gu)Įa(chn)I(y)Ⱥa(chn)I(y)B(ti)ӿЇHһ(chung)Ї()йȫЮa(chn)I(y)朹(yng)Ƽ(chung)ͻa(chn)I(y)Ч(yng)@F(xin)˱оԺо(dng)(lin)ϣſƼпph(hun)ӵһИI(y)I(lng)܊I(y)ɞȫʡΨһȫ锵(sh)ͬr(sh)м·MEMSAa(chn)ijĿǰ܂a(chn)I(y)P(gun)I(y)_(d)200wO(sh)Ӌ(j)Abyԇ(yng)ģMȮa(chn)I(y)朗l(g)h(hun)(ji)wϵȫa(chn)I(y)Ч(yng)@F(xin)
δ(hu)н(jng)_^(q)@йȵĮa(chn)I(y)A(ch)@^(q)λa(chn)I(y)ȷM(jn)ƽwаl(f)ƬܛJ(rn)CO(sh)Aȶa(b)N܂Юa(chn)I(y)(xing)ߵȡЇI(y)F(tun)eO(do)P(gun)a(chn)I(y)YԴɹa(chn)I(y)(xing)ĿԼa(chn)I(y)P(gun)Ŀ͑YԴЇ()йȼƄ(dng)܂Ʒa(chn)I(y)еđ(yng)áͬr(sh)ЇI(y)F(tun)cʡбоԺO(sh)ʡc(din)(sh)(yn)a(chn)I(y)(chung)оԺаl(f)C(j)(gu)eOȡ(chung)Ҽаl(f)ƽ_(ti)
ЌԱô(hu)C(j)@܂@һ}ͬa(chn)I(y)l(f)չڅ(dng)ͬоa(chn)I(y)l(f)չC(j);ӑ߿Ƽ(chung)O(sh)F(xin)a(chn)I(y)wϵ·cweɿоwNȫa(chn)ֵǧ|Įa(chn)I(y)Ⱥγɇ(ni)һ֪Ї()йע돊(qing)ń(dng)
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