ЈLjؔ(jng)W(wng)(m.xomn.cn)аӍ( ӛ |)42123գЇ()MEMS܂a(chn)I(y)l(f)չڰek
ЇMEMS܂a(chn)I(y)l(f)չИI(y)(ni)OӰIĮa(chn)I(y)ʢ2017ڰɹekČô“о۽ Ǹ”}(ni)SI(y)ۡ˲C300܂a(chn)I(y)I(y)20ͶYC(gu)Ԓ\l(f)չ
hg“L”MEMSca(chn)I(y)(chung)(lin)˽Ƴek˂c(lin)W(wng)a(chn)I(y)l(f)չՓ“L”MEMSca(chn)I(y)f(xi)ͬl(f)չՓ{g(sh)(chung)ca(chn)I(y)HՓeͶYǢՄͮa(chn)I(y)Ŀ·a(chn)I(y)朸h(hun)(ji)ͨԒƽ_f(xi)ͬ(chung)°l(f)չ(jng)͌`
ʡcЇI(y)Fӆ(zhn)Ժ܅f(xi)hQЇ()й(chung)Ҽаl(f)ƽ_O{a(chn)I(y)ͶYka(chn)I(y)l(f)չՅf(xi)hpeOPa(chn)I(y)YԴɹa(chn)I(y)ĿԼa(chn)I(y)P͑YԴЇ()йȼ;боԺOʡca(chn)I(y)(chung)оԺаl(f)C(gu)eOȡ(chung)Ҽаl(f)ƽ_;ͻa(chn)I(y)a(chn)I(y)IMȺeO̽(gu)“ƽ_++K”ȫB(ti)wϵOӏڱڑԮȻYԴ{(dio)O(jin)y|(zh)ĺO(jin)y늾W(wng)ͨ\ݔˮһwCϹȷĽOƏV
l(f)Ї()йȑ(zhn)Ҏ(gu)܂a(chn)I(y)ȫչʾ˰܂a(chn)I(y)Iȼg(sh)߶ˮa(chn)Ʒȫ֮һи߶ҕ܂a(chn)I(y)l(f)չӿMƼ(chung)¹wϵOȫ(gu)Įa(chn)I(y)Ⱥa(chn)I(y)B(ti)ӿЇHһ(chung)Ї()йȫЮa(chn)I(y)朹ƣƼ(chung)ͻa(chn)I(y)Ч@F(xin)챱оԺо(lin)ơϣſƼпph(hun)ӵһИI(y)I܊I(y)ɞȫʡΨһȫǰеͬrм·MEMSAa(chn)ijĿǰ܂a(chn)I(y)PI(y)_200wOӋAbyԇģMȮa(chn)I(y)朗lh(hun)(ji)wϵȫa(chn)I(y)Ч@F(xin)ɿоwNȫa(chn)ֵǧ|Įa(chn)I(y)Ⱥγɇ(ni)һ֪Ї()й
ϣͶY137|Ԫ40ĿMкs΄(chung)I(y)ͶYһϢg(sh)a(chn)I(y)l(f)չِ܂ǰͶY3֧O
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